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Wafer Inspection

Analytical and Diagnostic Services

Semiconductor Analytical Services offers specialized testing services to support microelectronic, disk drive, solar, lithium battery and other high technology industries. Our experienced staff responds quickly to accomodate the specific needs of customers, and our rates are extremely competitive.

      SAS respects the confidential nature of the work we perform and we take extra precautions to protect customer information and trade secrets.

      Our new laboratory facility located in Milpitas, CA offers a wide spectrum of materials analysis, micro-contamination analysis, and materials characterization using advanced analytical equipment and methods.

Micro-contamination Analysis and Identification

The SAS Laboratory provides micro-analysis of high purity electronic materials to sub-ppb levels in order to identify and characterize trace contamination in organic and inorganic samples. Test results of are always checked for accuracy by duplicate sampling at different times and conditions. Our policy is to use internal spiking and and internal standards on different concentrations to confirm the accuracy of results.








The highly skilled staff in our R&D department analyzes test results to determine the root cause of yield loss from micro-contamination and other process related problems. SAS scientists work directly with the customer's process and equipment engineers to achieve the most cost effective solutions to their problem. SAS may request additional samples to complete their studies and, if needed, will collect and evaluate samples at the customer’s facility.
         SAS R&D is supported by a network of chemists, physicists, and engineers from academic institutions around the country. Depending on the nature of the assignment SAS is able to obtain expert advice to help solve virtually any problem.  

        Semiconductor Analytical Systems has performed many investigations into process issues related to semiconductor, solar and hard disk manufacturing.  For example, we have identified the cause of contamination on ceramic elements in a CVD reactor, investigated and solved a dry etch process problem, and helped to achieve uniformity in a chemical purification process.  SAS has successfully resolved these and many other process problems in a timely and cost-effective manner.

        We welcome the opportunity to help you.  Please contact us.

Research and Development - Delivering effective solutions for over 30 years

Case Histories


Determining the cause of contamination on the surface of ceramic parts in a CVD reactor 


Suppression of ionic contamination from an aqueous solution in an electric field



Determining the cause of isotropic profile in a dry etch process



Dark discoloration on ceramic parts in a CVD reactor
 was probable cause of yield loss.


Problem: The Surface of ceramic parts in a CVD reactor became blackened as the reaction chamber was heated to process temperature.


SAS received samples of the ceramic parts to determine what was causing the parts to discolor. Laboratory tests determined that the discoloration was a carbon-based compound.  The parts were sent to SAS R&D for futher investigation and they were found to be of low density and highly porous. It also was learned that the organic solvent used to clean parts had penetrated the ceramic. At high process temperature the organic material decomposed to form a carbon compound and that was the surce of contamination on process wafers.


Problem Solved:  SAS advised the customer to fabricate their parts from a higher density ceramic. The switch was made, the problem was solved, and production-worthy yield was restored.  

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