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Wafer Inspection

Analytical and Diagnostic Services

Semiconductor Analytical Services offers specialized testing services to support microelectronic, disk drive, solar, lithium battery and other high technology industries. Our experienced staff responds quickly to accomodate the specific needs of customers, and our rates are extremely competitive.

      SAS respects the confidential nature of the work we perform and we take extra precautions to protect customer information and trade secrets.

      Our new laboratory facility located in Milpitas, CA offers a wide spectrum of materials analysis, micro-contamination analysis, and materials characterization using advanced analytical equipment and methods.

Micro-contamination Analysis and Identification

The SAS Laboratory provides micro-analysis of high purity electronic materials to sub-ppb levels in order to identify and characterize trace contamination in organic and inorganic samples. Test results of are always checked for accuracy by duplicate sampling at different times and conditions. Our policy is to use internal spiking and and internal standards on different concentrations to confirm the accuracy of results.








The highly skilled staff in our R&D department analyzes test results to determine the root cause of yield loss from micro-contamination and other process related problems. SAS scientists work directly with the customer's process and equipment engineers to achieve the most cost effective solutions to their problem. SAS may request additional samples to complete their studies and, if needed, will collect and evaluate samples at the customer’s facility.

       SAS R&D is supported by a network of chemists, physicists, and engineers from academic institutions around the country. Depending on the nature of the assignment SAS is able to obtain expert advice to help solve virtually any problem.  

        Semiconductor Analytical Systems has performed many investigations into process issues related to semiconductor, solar and hard disk manufacturing.  For example, we have identified the cause of contamination on ceramic elements in a CVD reactor, investigated and solved a dry etch process problem, and helped to achieve uniformity in a chemical purification process.  SAS has successfully resolved these and many other process problems in a timely and cost-effective manner.

        We welcome the opportunity to help you.  Please contact us.

Research and Development - Delivering effective solutions for over 30 years

Case Histories


Determining the cause of contamination on the surface of ceramic parts in a CVD reactor 


Suppression of ionic contamination from an aqueous solution in an electric field



Determining the cause of isotropic profile in a dry etch process



Suppression of ionic contamination from
an aqueous solution in an electric field.



A customer's purification process was yielding poor results, so the SAS Laboratory was asked to analyze several samples of the solution to determine the concentration of different ions in each sample.  Each sample had been purified at a different time using the same ion exchange process and protocol. Ion chromatography found that each batch had a different ionic concentration and the samples were sent to the R&D department for further evaluation.

      R&D personnel believed the purification equipment was at fault and requested information about its design. Design study revealed that the solution was not flowing through the purification system at a rate sufficient for the bulk ions to reach the exchange membarne and electrodes.



The R&D team recommended placing a layer of ion exchange screen between the exchange membranes and electrodes in order to create a turbulence that would allow ions in solution to reach the ion exchange membrane next to the electrode.

        The customer made the recommended equipment modification and the desired batch-to-batch uniformity was achieved and production-worthy yield was realized.  

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